Calibration of Wavelength Scanning in Wavelength Scanning Interferometer.
نویسندگان
چکیده
منابع مشابه
Quadrature wavelength scanning interferometry.
A novel method to double the measurement range of wavelength scanning interferometery (WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign ambiguity, that is, from an interference signal it is not possible to distinguish whether the OPD is positive or negative. The sign ambiguity can be resolved by measuring an interference signal in quadrature. A method t...
متن کاملVariable tomographic scanning with wavelength scanning digital interference holography
We present a new method for variable tomographic scanning based on the wavelength scanning digital interference holography (WSDIH). A series of holograms are generated with a range of scanned wavelengths. The object field is reconstructed in a number of selected tilted planes from each hologram, and the numerical superposition of all the tilted object fields results in a variable tomographic sc...
متن کاملAcceleration Computing Process in Wavelength Scanning Interferometry
The University Repository is a digital collection of the research output of the University, available on Open Access. Copyright and Moral Rights for the items on this site are retained by the individual author and/or other copyright owners. Users may access full items free of charge; copies of full text items generally can be reproduced, displayed or performed and given to third parties in any ...
متن کاملPixel super-resolution using wavelength scanning
Undersampling and pixelation affect a number of imaging systems, limiting the resolution of the acquired images, which becomes particularly significant for wide-field microscopy applications. Various super-resolution techniques have been implemented to mitigate this resolution loss by utilizing sub-pixel displacements in the imaging system, achieved, for example, by shifting the illumination so...
متن کاملAccelerated Surface Measurement Using Wavelength Scanning Interferometer with Compensation of Environmental Noise
The optical interferometry systems are widely used for surface metrology. However, the environmental noise and the data analysis approach can limit the measurement performance during inprocess inspection. This paper introduces a wavelength scanning interferometer (WSI) for micro and nano-scale areal surface measurement. The WSI can measure large discontinuous surface profiles without phase ambi...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2002
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.68.392